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As regulators place ever greater emphasis on sustainability, semi fabs are under growing pressure to increase the quality and decrease the quantity of water in waste streams. As the primary indicator of water quality, accurate resistivity measurement is crucial.
RCA cleaning is used between each step of wafer production and utilizes three or four cleaning baths, each followed by an ultrapure water (UPW) rinse to remove chemicals, residues, and particles before the next production step.
Typical resistivity sensors available today offer measurement accuracy of +/- 1%. This level of uncertainty may be acceptable for some processes, but it does not help semi fabs meet their needs for the production of next-generation technologies. To address these evolving requirements, METTLER TOLEDO Thornton has developed the UPW UniCond™ resistivity sensor - the only available resistivity sensor capable of achieving ≥0.5% accuracy on a temperature-compensated resistivity measurement.
Do you want to be truly certain only the purest water is reaching points of use? Mettler Toledo Thornton has the answer. As the number of chips per wafer increases and line widths get narrower, the ability to catch trace ionic impurities will greatly improve your wafer yield and quality. But the big question is, can your resistivity sensors keep up? Resistivity measurement provides a cumulative measurement of ions and is often used as the primary means of detecting impurity trends, so this measurement is critical to ensuring water purity. Through close collaboration with industry partners, Mettler Toledo Thornton has developed the UPW Unicont. Cutting edge advancements in accuracy, signal stability and environmental isolation make the UPW Unicont the only resistivity sensor are capable of meeting the evolving challenges of the semiconductor industry. With UPW Unicon, you can be sure that your water is pure enough to achieve yield targets. And because UPW Unicon's signal stability makes it possible to differentiate actual changes in your water from noise, you can avoid taking unnecessary action when water is still in spec. Now you can eliminate cyclical changes in resistivity readings due to daily or seasonal changes in environmental and process temperatures. Be prepared for the future with the unparalleled accuracy of the Mettler Toledo UPW Unicont. To learn more, visit www.mt.com forward slash UPW Unicont.
For RCA cleaning, this improvement in measurement accuracy will help users:
- Increase wafer yield by tightening incoming water quality specifications without action levels falling within the error of the sensor.
- Confidently make faster decisions on rinse-to-resistivity to improve throughput.
- Make earlier determinations on where to divert waste streams, maximizing water for reclaim/reuse, and minimizing water sent to discharge.
.png/_jcr_content/renditions/cq5dam.web.1280.1280.png "In-Line pH Probe / ORP (Redox) Probe")
.png/_jcr_content/renditions/cq5dam.web.1280.1280.png "Transmitters")