The water cycle in semiconductor manufacturing begins with raw water (1) being brought to the facility, where it undergoes pre-treatment (2), makeup, and polishing (3) stages. Once polished, the UPW is distributed to the fabrication plant (4 - Fab), where it is used in multiple tools and processes, such as cleaning, etching, and chemical mechanical planarization (CMP). Post-use, the water is often reclaimed (5) for recycling within the UPW loop, used in other applications like boilers and scrubbers (11), or treated as waste (6) based on its contamination levels.
Organic contaminants in ultrapure water are commonly monitored in semiconductor fabs. UV/Vis spectrophotometry can detect organic compounds by measuring their absorbance at specific wavelengths, ensuring the water meets high-purity standards.
pH and conductivity measurements are key parameters that impact the success of the precipitation step in wastewater treatment. One of the techniques to analyze the concentration of heavy metals is by measuring the absorbance of specific metal ion complexes at a suitable wavelength. Controlling the concentration levels of heavy metals ensures that wastewater treatment processes are effective and compliant with environmental regulations.
The semiconductor industry is increasingly focused on reducing its water footprint. Legislation in various regions mandates high levels of water reuse and reclamation, often up to 90%. Effective segregation and treatment of waste streams, such as neutralizing hydrofluoric acid and converting ammonia for safe discharge, are critical steps in this process.
Effective water cycle management in semiconductor manufacturing is not only about ensuring the highest quality of UPW but also about sustaining environmental responsibility. By employing advanced sensor technology and adhering to rigorous monitoring and maintenance protocols, semiconductor facilities can optimize their water use, ensure compliance with regulatory standards, and contribute to environmental sustainability.
METTLER TOLEDO Thornton provides a comprehensive portfolio of sensors and analyzers, including pH, conductivity, resistivity, TOC, dissolved oxygen, microbial detection, and silica sensors. These instruments are integral in maintaining the highest quality UPW. Intelligent Sensor Management (ISM) technology offers predictive diagnostics, adaptive calibration, and maintenance alerts, enhancing operational efficiency and reducing downtime.
Offline water analyses performed punctually help verify the accuracy of the online monitoring system, with applications for benchtop instruments such as density, refractive index, pH, conductivity, ions and dissolved oxygen (DO), titration, and UV/Vis measurements.
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