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Flat Panel Display HF Etching Solutions

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Conductivity and pH Measurement with the Right Sensors

In flat panel display manufacturing, etching with hydrofluoric acid is an important step. Due to HF's corrosivity, etching baths, as well as rinse waters and wastewater neutralization require careful selection of conductivity and pH sensors for process monitoring.

This application note looks at the role of conductivity and pH sensors in flat panel display HF etching processes and why it is vital to choose the right analytical sensors for etching, rinsing and wastewater treatment.