Investigation of the Thermal Stability of CNx with TGA-MS - METTLER TOLEDO

Investigation of the Thermal Stability of CNx with TGA-MS

Introduction

Carbon nitride (CNx) is a new type of material that is remarkable in having a degree of hardness similar to that of diamond [1]. Thin layers of this compound are routinely made at the Institute of Ceramics of the Chinese Academy of Sciences in Shanghai. The Chinese researchers wanted to learn more about the thermal stability of such layers and asked METTLER TOLEDO if they could help. Samples of the material were investigated in the METTLER TOLEDO applications laboratory in Schwerzenbach using a TGA/SDTA851e coupled to a Balzers Thermostar mass spectrometer (MS).

Fig. 1. Thermogravimetric measurements of CNx on a Si substrate: heating rate 10 K/min, stationary air atmosphere, 70 μl alumina crucible (open), sample weight 63.627 mg CNx on a Si substrate.

 

Results

CNx was available in the “pure” form (as thin flakes with a typical diameter of 2 mm) and also as thin layers on a silicon substrate. The samples were prepared by reactive sputtering onto NaCl or silicon. The CNx layer was afterward separated from the NaCl substrate, resulting in the...



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Conclusions

The thermal stability of thin layers of CNx sputtered on silicon substrates and of pure CNx flakes was investigated under different atmospheric conditions using a TGA combined with a mass spectrometer. The results showed that CNx decomposes in several steps. These could be assigned to different processes with the aid of the MS data.



Investigation of the Thermal Stability of CNx with TGA-MS | Thermal Analysis Application No. UC143 | Application published in METTLER TOLEDO Thermal Analysis UserCom 14