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A major semiconductor fabricator required a resistivity sensor that would surpass the performance of currently available instruments. METTLER TOLEDO Thornton worked with the fab on a sensor that sets a new standard in resistivity measurement.
The fabricator's demanding adherence to improved production yield necessitated a level of resistivity measurement stability and accuracy well beyond current industry standards. A partnership with METTLER TOLEDO was set up to find a solution.
The result is the UPW UniCond(TM), a resistivity sensor with significantly better temperature compensation, signal stability, and environmental isolation than previously available.
Based on highly successful test results, the fabricator has accepted the UPW UniCond as their new resistivity measurement solution and has specified that all their global plants use the new sensor when upgrading or designing new fabs.
This case study looks at the testing performed by the fabricator and the results.
As semiconductor linewidths continue to narrow, the need to improve UPW quality will only grow in order to maintain high wafer yield.
Most resistivity sensors offer measurement accuracy of +/- 1%. Currently, action levels set by SEMI F63 fall within this error range. This level of uncertainty may be acceptable for some processes, but it does not help semi fabs meet their needs for the production of next-generation technologies. The UPW UniCond is the only available resistivity sensor capable of achieving ≥0.5% accuracy on a temperature-compensated resistivity measurement.
.png/_jcr_content/renditions/cq5dam.web.1280.1280.png "Conductivity Sensor / Resistivity Sensor")
.png/_jcr_content/renditions/cq5dam.web.1280.1280.png "Transmitters")